http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201721304-A

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filingDate 2011-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ab9fd0e67049447b5c4db1f50f5e898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9767b344e595bc40e9998e877ce2a5b8
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publicationDate 2017-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201721304-A
titleOfInvention Pattern forming method and developer
abstract The present invention provides a pattern forming method comprising (a) forming a chemically amplified resist composition into a film, (b) exposing the film, and (c) exposing the film with a developer containing a first organic solvent Film development in which the density of particles each having a diameter of 0.3 μm or more in the developer is equal to or lower than 30 particles/ml.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I779159-B
priorityDate 2010-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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