http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201720962-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6038f17109882ad88e9ba8ea907ebb45 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0789 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2016-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2019deb804b9446e634283d72ec3a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a37361f6bc44a91e67d040d34cb3b2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28f4fc76f9d53245ae1aa9f5cd47dd43 |
| publicationDate | 2017-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201720962-A |
| titleOfInvention | Etching liquid, replenishing liquid, and method of forming copper wiring |
| abstract | The present invention provides an etching solution, a replenishing liquid thereof, and a method of forming a copper wiring, which can suppress side etching without suppressing the linearity of the copper wiring (wiring width (W2) at the top of the copper wiring), and can suppress copper wiring. The wiring width (W1) at the bottom is uneven. The copper etching solution of the present invention comprises an acid and one or more compounds selected from the group consisting of aliphatic acyclic compounds, aliphatic heterocyclic compounds, and heteroaromatic compounds; the aforementioned aliphatic acyclic The compound is a saturated aliphatic acyclic compound (A) having 2 to 10 carbon atoms, and has only two or more nitrogens as a hetero atom; and the above aliphatic heterocyclic compound is a compound containing a 5-membered ring to a 7-membered ring (B) The above-mentioned 5-membered ring to 7-membered ring has one or more nitrogens as a hetero atom constituting a ring; the heteroaromatic compound is a compound (C) containing a 6-membered aromatic heterocyclic ring, and the above-mentioned 6-membered aromatic heterocyclic ring has 1 The above nitrogen is used as a hetero atom constituting the ring. |
| priorityDate | 2015-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 719.