| abstract |
The invention provides a variable sensing element comprising a substrate, a dielectric body, a modulation body, and an electrode unit. The dielectric body includes a dielectric bottom formed on the substrate, a dielectric side extending away from the substrate by a periphery of the dielectric bottom, and a dielectric top connecting the dielectric sides, and collectively defining an accommodation space. The modulation body is filled in the accommodating space, and can change the rigidity when subjected to an electric field or a magnetic field. The electrode unit includes a first electrode layer disposed on the bottom of the dielectric, and a second electrode layer disposed on the top of the dielectric and not in contact with the modulation body. When one of an electric field and a magnetic field is applied to the electrode unit, and an external force is applied to the dielectric body, the modulation body may have different deformations due to the difference in rigidity. |