| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B41-06 |
| filingDate |
2016-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b1cef34a9fcdef75323cd5d16467b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f18a4621a00364d4b23cb26b842e749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbd8f0716e16ce0476cab8ddd549d897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4356268bfa9728d93ed4c22af017af7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2255aeda7b71e89346d3248783f6a05e |
| publicationDate |
2017-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201714705-A |
| titleOfInvention |
External clamp ring for chemical mechanical polishing of the carrier head |
| abstract |
The present invention describes an outer clamp ring for a chemical mechanical polishing (CMP) carrier head having a hydrophobic coating, and a carrier head having the outer clamp ring. In one embodiment, an outer clamp ring comprising a cylinder having an outer cylindrical wall and an inner cylindrical wall is provided. The hydrophobic layer is disposed on the outer cylindrical wall. |
| priorityDate |
2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |