| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66636 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate |
2016-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5fd41d238e0589cae04c47b9ed0c95b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a604e89f23cb24a36592c83a4c3c0dfd |
| publicationDate |
2017-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201714309-A |
| titleOfInvention |
Fin field effect transistor structure and manufacturing method thereof |
| abstract |
Embodiments of the present invention relate to a fin field effect transistor structure and a method of fabricating the same. A fin field effect transistor includes a substrate, a plurality of insulators, at least one gate stack structure, and a strained material portion. The substrate has a plurality of fins on the substrate and the fins include a stop layer embedded in the fins. A plurality of insulators are disposed on the substrate and between the plurality of fins. At least one gate stack structure is disposed over the plurality of fins and disposed on the plurality of insulators. The strained material portions are disposed on opposite sides of the at least one gate stack structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10665700-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387351-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I650805-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269940-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I684215-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784242-B2 |
| priorityDate |
2015-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |