| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75b765b53e6651e9863a3a35e4c1e164 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-22 |
| filingDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dedd04b4ac023652677d45541ef39ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_876050bf005dac1bda41487944e10b9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66cbde72800107277da2dd410c128747
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d2b35206025349dffcb2b1494cdadbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60358d7894c2e5309bd1cf4498548a65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0863b2367f2d3c135e961e9f445b538 |
| publicationDate |
2017-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201711953-A |
| titleOfInvention |
Method for preparing transition metal chalcogenide |
| abstract |
SUMMARY OF THE INVENTION The present invention is directed to a method of preparing a transition metal chalcogenide which produces a transition metal chalcogenide at a substrate temperature of from 150 to 500 degrees and a process environment of from 25 to 760 Torr. Moreover, the source of the chalcogen element used in the present invention is to obtain a chalcogenide plasma by heating and ionizing the chalcogenide solid source, so that it is possible to avoid the use of the conventional method for preparing a transition metal chalcogenide in the present invention. The highly toxic hydrogen sulfide gas. |
| priorityDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |