http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201710470-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c19a91365ed494d9fe27d24190d4459f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2016-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c16e478235409399e0017e6c2161058 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_633dfb2f08b0b46fbcb170fb985f9c9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10de882f93c61726e7c57302d4a443a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_292bb1a9bba7ee6003a4a05857397e36 |
| publicationDate | 2017-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201710470-A |
| titleOfInvention | Etching solution and etching concentrate for multilayer film and etching method |
| abstract | In the etching solution in which the copper layer is etched in one layer on the multilayer film of the molybdenum layer, the cross-sectional shape of the edge after etching is required to be a shape having no undercut and a conical shape, and no precipitate is generated in the etching liquid. It is important to use when it is produced.nAn etching solution for a multilayer film comprising a copper layer and a molybdenum layer comprising hydrogen peroxide, an inorganic acid, an acidic organic acid, a neutral organic acid, an amine compound and a hydrogen peroxide inhibitor, which does not contain an azole compound, and hydrogen peroxide No reactant was formed between them, and no precipitate was produced in the etching solution. Further, the cross-sectional shape of the edge after etching can be made into a desired tapered shape. Further, since the phosphorus compound and the fluorine compound are not contained, the environmental load at the time of disposal is also light. |
| priorityDate | 2015-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 170.