http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201709284-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225 |
| filingDate | 2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_def1e66f171cfd7af0ff3e3817c4e5da |
| publicationDate | 2017-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201709284-A |
| titleOfInvention | Diffusion agent composition |
| abstract | An object of the present invention is to provide a diffusing agent composition which can diffuse an impurity diffusing component into a semiconductor substrate even when a diffusing agent composition is applied to a semiconductor substrate at a film thickness of a nanometer.nThe solution of the present invention is that the diffusing agent composition contains the impurity diffusing component (A) and the Si compound (B) represented by the following formula (1), and the Si compound (B) can be hydrolyzed to form a sterol group. R4-nSi(NCO)n. . . (1)n(In the formula (1), R is a hydrocarbon group, and n is an integer of 3 or 4)nThe moisture content of the diffusing agent composition is set to 0.05% by mass or less. |
| priorityDate | 2015-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 146.