http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201708453-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-10
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
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filingDate 2016-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05ebb35224b3d79977ef337a82f09943
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publicationDate 2017-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201708453-A
titleOfInvention Tungsten polishing slurry composition
abstract The present invention relates to a tungsten polishing slurry composition, and the tungsten polishing slurry composition of the present invention comprises a water soluble polymer, a polishing powder, and an etching regulator.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I808200-B
priorityDate 2015-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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