| abstract |
An object of the present invention is to provide a novel surface treatment agent, a surface treatment method and a surface treatment apparatus which can form a layer having higher alkali resistance.nThe surface treatment agent for a nitrided surface of the present invention contains a fluorine-containing compound having a carbon-carbon unsaturated bond at a molecular terminal as a group represented by -YA, wherein Y represents a single bond, an oxygen atom or 2 The organic group of the valence, A represents -CH=CH2 or -C≡CH. |