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publicationDate 2017-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201700662-A
titleOfInvention Chemical mechanical polishing treatment composition, chemical mechanical polishing method and cleaning method
abstract The chemical mechanical polishing treatment composition of the present invention is characterized by comprising (A) a water-soluble amine, (B) a water-soluble polymer having a repeating unit containing an aromatic hydrocarbon group, and an aqueous medium, preferably containing (C) an aromatic group. A hydrocarbon-based organic acid having a pH of 9 or more.
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