http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201638290-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-18 |
| filingDate | 2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2c81c70b94789c97c58a57d68d32ad0 |
| publicationDate | 2016-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201638290-A |
| titleOfInvention | Grinding composition |
| abstract | An object of the present invention is to provide a polishing composition which is capable of sufficiently controlling the polishing rate of an object to be polished having a cerium-oxygen bond such as a cerium oxide film, in at least one of acidic, neutral or basic.nThe present invention provides a polishing composition comprising the following components (1) to (3), and suppressing the polishing target having the oxime-oxygen bond in at least one of acidic, neutral or basic In the polishing rate, the component (1) has an action site that interacts with the object to be polished having a 矽-oxygen bond, and an organic compound that inhibits the polishing component that polishes the object to be polished from approaching the site of the object to be polished; (2) ) abrasive particles; and (3) a dispersion medium. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110506093-A |
| priorityDate | 2015-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 166.