abstract |
An object of the present invention is to provide a composition for forming an underlayer film which can form a film having a flat surface.nThe solution of the present invention is a composition for forming an underlayer film, which comprises a specific polymer and a solvent in which a repeating unit contains nitrogen. By applying the composition for forming an underlayer film on the surface of the substrate, it is preferably heated in an inert gas atmosphere, and then fired in an oxygen-containing atmosphere to form a lower layer film. |