http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201635423-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-02 |
| filingDate | 2015-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a61deda83a2e47fac302602e07af3de1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_851e2c94a4083c0d3e8ee96cb2497fb9 |
| publicationDate | 2016-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201635423-A |
| titleOfInvention | Substrate holder, method for holding substrate by substrate holder, and plating device |
| abstract | The present invention discloses a substrate holder, a method of holding a substrate by a substrate holder, and a plating apparatus, which can suppress a thickness of a plating film of a small wafer (Die) adjacent to a pattern portion not formed in the resist layer, so that the substrate surface The film thickness uniformity inside is improved. The substrate holder has a holding surface 57 for holding the substrate, and a second holding member 60 having an opening 63 for exposing the holding surface 57, and pressing the substrate provided on the holding surface 57 The holding surface 57 is configured to hold the substrate; and the shielding plate 65 protrudes radially inward of the opening 63 of the second holding member 60 to shield a portion of the holding surface 57. The shielding plate 65 is configured to be movable along the opening portion 63. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I705161-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114855251-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I781275-B |
| priorityDate | 2014-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554239 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID727 |
Total number of triples: 22.