| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2255-26 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B3-266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B3-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2016-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a6c7650c719ac8d174c25eca4982f8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfd817b3b4b7b6b42ab0ea6796adcec2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36a022477ff7eb5d7149203b2aec646b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05f24d2638752f91da99fd428166da82 |
| publicationDate |
2016-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201631397-A |
| titleOfInvention |
Polymer compound containing polyfluorene skeleton, chemical amplification type negative photoresist material, photocurable dry film, method for producing the same, pattern forming method, laminate, substrate, and semiconductor device |
| abstract |
The present invention provides a polymer compound containing a polyfluorene skeleton, which is suitable as a problem of improving peeling occurring on a metal wiring such as copper or aluminum, an electrode, a substrate, and particularly a substrate such as tantalum nitride, which can be at the bottom of the pattern. A base resin of a chemically amplified negative-type photoresist material in which a fine pattern is formed without scum or tailing on the substrate. A polymer compound containing a polyfluorene skeleton characterized by having a repeating unit represented by the following formula (1). [Chemical 1] □ |
| priorityDate |
2015-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |