http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201631217-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2015-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef58a1bb9ec60924e5ac12d9a312802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_881a80009d01d6e88b3952fd5db31a52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b88124143861870760c502c3d3045a8 |
| publicationDate | 2016-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201631217-A |
| titleOfInvention | Etching liquid, etching method using the same, and method for manufacturing semiconductor substrate product |
| abstract | The present invention provides an etchant that removes titanium on a substrate. Further, the present invention provides an etching method capable of suppressing damage of a layer containing germanium and/or germanium on a substrate, particularly a germanide layer thereof, and selectively removing a layer containing titanium, and an etching method using the same A method of manufacturing a semiconductor substrate. Further, the present invention provides an etching solution for suppressing damage of each metal or composite compound layer applied to a semiconductor substrate, such as W, TiN, TiAlC, etc., and realizing the good titanium removal property, and etching using the same. Method and method of manufacturing a semiconductor substrate. An etchant applied to a substrate containing titanium and tantalum and/or niobium to remove titanium and containing fluoride ions and an oxidant. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10934484-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I683362-B |
| priorityDate | 2014-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 147.