http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201631073-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2016-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2f4c494e2833c66376bd0d313330114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02b4d8cf0a4b2484b45a49f2c1fd3b13 |
| publicationDate | 2016-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201631073-A |
| titleOfInvention | Grinding composition |
| abstract | An object of the present invention is to provide a sulfonic acid-modified aqueous anionic sol which can improve the SiN polishing rate over time when it is used as an abrasive grain for polishing a polishing target containing SiN. And the technique of reducing the content of hydrogen peroxide.nThe solution of the present invention is characterized in that the polishing composition having a pH of 6 or less contains a sulfonic acid-modified colloidal ruthenium and a water obtained by immobilizing a sulfonic acid on the surface of the cerium oxide particles; The acid-modified colloidal oxime is an aqueous anionic oxime modified from a sulfonic acid produced by a production method comprising: a decane having a functional group chemically converted into a sulfonic acid group In the presence of a coupling agent, the first reaction step of the reactant is obtained by heating the colloidal hydrazine of the raw material, and the raw material has a colloidal enthalpy having a volume of Heywood diameter (circular equivalent diameter) obtained by image analysis using a scanning electron microscope. The number distribution ratio of the fine particles having a particle diameter of 40% or less of the average particle diameter is 10% or less; and the second reaction step of converting the functional group into a sulfonic acid group by treating the reactant. |
| priorityDate | 2015-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 119.