| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B2203-037 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29D7-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a02db22c3089c77bc2ed95a15d0bed8 |
| publicationDate |
2016-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201630110-A |
| titleOfInvention |
Heating plate with flat heater zone for semiconductor processing |
| abstract |
The present invention relates to a heating plate for a substrate holder assembly of a semiconductor plasma processing apparatus, comprising a plurality of independently controllable flat heating zones configured to be scalable multiplexed wiring designs, and for independently controlling and driving the Electronic equipment in the flat heater zone. Each flat heating zone contains one or more heater elements comprised of an insulator-conductor composite. A substrate holder assembly having a heating plate incorporated therein includes an electrostatic clamping electrode and a temperature controlled base. A method for fabricating a heater plate includes bonding ceramic sheets having a flat heater zone, a power supply line, a power return line, and a via. |
| priorityDate |
2010-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |