http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201629644-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
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filingDate 2015-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_622d5cee9a636312763580665a088223
publicationDate 2016-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201629644-A
titleOfInvention a composition for removing photoresist residue and/or polymer residue
abstract The present invention provides a composition for removing a photoresist residue and/or a polymer residue generated in a manufacturing step of a semiconductor circuit element, and a method of removing the composition using the same.nThe composition is a composition for removing photoresist residue and/or polymer residue, characterized by comprising saccharin and water, and having a pH of 9.7 or less.
priorityDate 2014-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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