| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09F9-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1368 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2015-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_059f9fb0a4b6abb94fb428b22ec94bf5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da85656661b0f99b5dc1157f59c78046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0b1766b873514d5dfce67f80a67b728
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d511f92bf26010fdcf91c063ebcb77ed |
| publicationDate |
2016-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201628023-A |
| titleOfInvention |
Method for producing oxide protective film, oxide protective film, method for producing thin film transistor, thin film transistor and electronic component |
| abstract |
A method for producing an oxide protective film and a method thereof, the method for producing an oxide protective film comprising the steps of: coating a semiconductor-containing oxide semiconductor film formed on a substrate with a solvent and 50 atom% or more of indium The metal component of the oxide protects the film precursor solution to form an oxide protective film precursor film; and the oxide protective film precursor film is converted into an oxide protective film having a higher specific resistance than the oxide semiconductor film. |
| priorityDate |
2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |