http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201627753-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bf0f5da18d8dfa687460aae11fab87c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62 |
| filingDate | 2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8eca597f5c999a505fdd598e0c5bbaf |
| publicationDate | 2016-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201627753-A |
| titleOfInvention | EUV reticle inorganic protective film assembly manufacturing method |
| abstract | A method for manufacturing an EUV mask inorganic protective film assembly, comprising: a frame, an inorganic protective film, and at least a first organic protective layer attached to an upper surface of the frame; an embodiment of the inorganic protective film Is a ruthenium crystal film, a ruthenium crystal film is formed on the other side of the first organic protective layer with respect to the first frame by the support of the first organic protective layer; and another embodiment of the inorganic protective film includes a ruthenium crystal film and A tantalum nitride layer (SiN) formed on opposite side surfaces of the tantalum crystal film can provide a relatively stable structure, and the tantalum nitride layer can also be replaced by a tantalum metal layer (Ru); in another embodiment of the present invention Further comprising a second organic protective layer formed on the other side of the inorganic protective film relative to the first organic protective layer, the first organic protective layer and the second organic protective layer until the reticle inorganic protective film component is attached to the surface of the reticle It has been removed before, which can prevent the inorganic protective film from being contaminated or damaged during storage and transportation. |
| priorityDate | 2015-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.