| abstract |
Provided is a composite substrate comprising: a monocrystalline niobium carbide film (11) having a thickness of 1 μm or less; and a heat-resistant material having a heat-resistant temperature of 1100 ° C or more supported by the monocrystalline niobium tantalum film (11) (except for monocrystalline niobium carbide) a handle substrate (12); and disposed between the single crystal tantalum carbide film (11) and the handle substrate (12), from tantalum oxide, tantalum nitride, aluminum oxide, aluminum nitride, zirconia At least one material selected from the group consisting of niobium, tantalum and niobium carbide, or at least one metal material selected from the group consisting of Ti, Au, Ag, Cu, Ni, Co, Fe, Cr, Zr, Mo, Ta and W The spacer layer (13) having a thickness of 1 μm or less. In the composite substrate of the present invention, a nano-carbon film having less defects can be produced at low cost. |