http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201624117-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2015-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04d3730b6ad527289e0c18d5b14850d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2016-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201624117-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | SUMMARY OF THE INVENTION An object of the present invention is to provide a resist composition capable of producing a resist pattern having a good line edge roughness.nThe resist composition of the present invention contains a resin (A1) having an acid labile group, a resin (A2) having a structural unit represented by the formula (I), and an acid generator.n□ [wherein R1 represents a hydrogen atom or a hydrocarbon group having 1 to 18 carbon atoms. A1 represents a single bond, a C 2 to 6 alkanediyl group or *-A2-X1-(A3-X2)a-(A4)b-. * indicates a bond with an oxygen atom.nA2, A3 and A4 each independently represent an alkanediyl group having 1 to 6 carbon atoms. X1 and X2 independently represent -O-, -CO-O- or -O-CO-, respectively. a represents 0 or 1. b represents 0 or 1. R2 represents a fluorinated saturated hydrocarbon group having 1 to 13 carbon atoms]. |
| priorityDate | 2014-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 213.