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filingDate 2015-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af4541a8495b615ad8c567da073a6689
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19c38fd722cb053eda940510dc76660a
publicationDate 2016-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201622030-A
titleOfInvention Cleaning liquid for semiconductor element capable of suppressing damage of ruthenium-containing material and cleaning method of semiconductor element using same
abstract According to the present invention, it is possible to provide a cleaning method for removing photoresist and dry etching residue on a surface of a semiconductor element having a Low-k film and a material containing 10 atom% or more of germanium, which is characterized in that hydrogen peroxide is used. 0.002 to 50% by mass, 0.001 to 1% by mass of an alkaline earth metal compound, and a cleaning solution of alkali and water.
priorityDate 2014-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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