http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201621266-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00 |
| filingDate | 2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64d78263b9b79ffc9f56d04f8919e05e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efb42cee73dbb47f8e47204ad9ba2a7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_233bbe7d0fbdcfdddf5c5bd3e2802c4b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_329111f54daee655939cba86fca214ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f37838eac6a7df39b49dd16181e71384 |
| publicationDate | 2016-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201621266-A |
| titleOfInvention | Small square size target measurement |
| abstract | Methods and systems for measuring metrology targets are described herein that are smaller than the illumination spot size used to perform the measurements. The collected measurement signals contaminated by information from structures around the target area are reconstructed to eliminate contamination. In some examples, a signal reconstruction construct is trained using measurement signals associated with one or more small targets and one or more large targets positioned in close proximity to one another. This model is then used to reconstruct the measurement signals from other small targets. In some other examples, a plurality of measurements at a different location within the target are untwisted to estimate the target region strength. The reconstructed measurement signal is determined by a swirling of the illumination spot profile and the intensity of the target zone. In a further aspect, the reconstructed signals are used to estimate values of the parameters of interest associated with the measured structures. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10845713-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I646410-B |
| priorityDate | 2014-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764 |
Total number of triples: 21.