| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f3801683ff7d88906e193527090a838a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate |
2015-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c744ac613e1753408c514df858aa42ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12548ada5d1d29b5ae80123d10142200
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_196ede9f806405621a354018a2fa38a3 |
| publicationDate |
2016-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201619354-A |
| titleOfInvention |
Composition for etching titanium nitride having bismuth telluride and tungsten compatibility |
| abstract |
The present invention relates to compositions suitable for the selective removal of such materials from metal-conducting (e.g., tungsten and copper) and insulating materials using microelectronic devices having titanium nitride and/or photoresist etch residues thereon. The compositions comprise at least one oxidizing agent, at least one etchant, and at least one organic solvent, which may comprise various corrosion inhibitors to ensure selectivity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112522707-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108615813-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108615813-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114316990-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115011347-A |
| priorityDate |
2014-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |