| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-26 |
| filingDate |
2015-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dde25be41dbf8b119a869aa63ceee83e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_638eff465046849df93493e00bcd0c0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fa6584838264f433a0a978c987aacd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d00365d26d0e02de0bbe9a11c4b2f27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0197fa1e20e044443064dc8349d18069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60ed8390d90d713c0e81b010439f8775 |
| publicationDate |
2016-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201616923-A |
| titleOfInvention |
Nozzle for uniform plasma treatment |
| abstract |
A nozzle for uniform plasma processing includes an inlet portion and an outlet portion. The inlet portion has a side surface that is substantially parallel to the vertical axis. The inlet portion includes a plurality of gas passages. The outlet portion is coupled to the inlet portion. The exit portion includes a plurality of outlets. At least one of the outlets is at a non-orthogonal angle relative to the vertical axis. |
| priorityDate |
2014-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |