| abstract |
In the wiring structure in which the wire of the piezoelectric element is welded to the wire of the piezoelectric element, a space for the wire is required, and the wire is easily broken during the wiring work.nA piezoelectric driving device according to the present invention includes: a vibrating plate; and a piezoelectric vibrating body having a substrate and a piezoelectric element provided on the substrate. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric body, and the first electrode, the piezoelectric body, and the second electrode are sequentially laminated on the substrate. The piezoelectric vibrating body is placed on the vibrating plate such that the substrate and the vibrating plate are interposed between the piezoelectric elements. A wiring pattern including a first wiring corresponding to the first electrode and a second wiring corresponding to the second electrode is formed on the diaphragm, and the first electrode and the first wiring are connected via the first laminated conductive portion, and the second electrode and the second electrode are The second wiring is connected via the second build-up conductive portion. |