http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201610125-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-8404 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3ecfcac8ccb27321aee1ebb7c8fc012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8fd7e0c38497becdd7eaee15418cd55 |
| publicationDate | 2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201610125-A |
| titleOfInvention | Polishing fluid composition for disk substrate |
| abstract | The present invention provides a method of manufacturing a disk substrate capable of reducing long-period defects on a surface of a substrate after rough grinding.nThe present invention is, in one aspect, a production method comprising (1) a polishing step using the polishing liquid composition I, (2) a step of washing the obtained substrate, and (3) using a cerium oxide-containing particle. The slurry composition of C is subjected to a step of grinding the obtained substrate, and the above steps (1) and (3) are carried out using different mills, and (i) the slurry composition I contains non-spherical cerium oxide. Particle A, spherical cerium oxide particle B, acid, oxidizing agent, and water, (ii) mass ratio (A/B) is 80/20 or more and 99/1 or less, and the total content of cerium oxide particles A and B exceeds 98.0% by mass, (iii) the ΔCV value of the non-spherical cerium oxide particle A is more than 0.0% and less than 10%, and (iv) the particle diameter ratio (D1/D2) of the non-spherical cerium oxide particle A is 2.00 or more and 4.00 or less, (v) the spherical average cerium oxide particle B has a volume average particle diameter (D1) of 6.0 nm or more and 80.0 nm or less, and (vi) the acid is a phosphoric acid, a phosphonic acid or an organic phosphonic acid. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I787294-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I755466-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11205453-B2 |
| priorityDate | 2014-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 75.