| abstract |
The present disclosure relates to a method of fabricating a sensing element comprising the following steps (A) and (B). (A) Applying a polyamine solution to a support material and forming a polyimide film on the aforementioned support material. (B) forming a sensing element on the surface of the aforementioned polyamide film. Here, the surface of the support material or the support material is a glass or tantalum wafer, and the polyamine of the polyamine solution has structural units represented by the following general formulae (I) and (II). □ |