http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201605731-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2015-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a2be733a5378a1b43857e3ce0a51b1f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1490f280b78d66f5208cfe2bd43e92d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba022755b00dd3565ebe341cafffca0 |
| publicationDate | 2016-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201605731-A |
| titleOfInvention | Abrasive grain, manufacturing method thereof, method for producing slurry, polishing liquid, method for producing same, and polishing method |
| abstract | The present invention provides a method for producing abrasive grains which can suppress the content of coarse particles and obtain a sufficient polishing rate of the insulating material. The method for producing abrasive grains of the present invention comprises the steps of: mixing a salt of a metal element, a precursor of a first base, and water to obtain an aqueous solution; and converting the precursor of the first base into the first in the aqueous solution a base conversion step; and a heating step of heating the liquid obtained by the converting step. |
| priorityDate | 2014-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.