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filingDate 2015-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03620c9a435d9fe2eec160fda9c7eb2b
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publicationDate 2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201604265-A
titleOfInvention Etching composition
abstract The present invention relates to an etching composition, a method of preparing the composition, and a method of producing a semiconductor device using the composition. The composition may comprise a first mineral acid, at least one decane mineral acid salt formed by a reaction between a second inorganic acid and a decane compound, and a solvent. The second inorganic acid may be at least one selected from the group consisting of sulfuric acid, fuming sulfuric acid, nitric acid, phosphoric acid, and combinations thereof.
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priorityDate 2014-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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