| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7851 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate |
2014-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79315c8b752f364de988d053f6f11484
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0614c97cefb9e5affcd19fa64495890e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbffbe577124483d0c4cd4aa63d17178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f400059585fee2148fc83ed9978f8a46 |
| publicationDate |
2016-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201603274-A |
| titleOfInvention |
Fin field effect transistor and manufacturing method thereof |
| abstract |
A fin field effect transistor (FinFET) and a method of fabricating the same. A FinFET includes a substrate having an upper surface and an insulator formed on an upper surface of the substrate. The substrate has at least one recessed fin extending upward from the upper surface of the substrate. The insulator includes a lateral portion adjacent to the recessed fin and a central portion adjacent the outer side portion, wherein an upper surface of the outer side portion is higher than an upper surface of the central portion. One of the upper surfaces of the recessed fin is lower than the upper surface of the central portion. |
| priorityDate |
2014-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |