| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32681f1832d227fe8df23d12a37f67a8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2111-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-781 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-505 |
| filingDate |
2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6edbc5b3e7a190538e7e52831a92859a |
| publicationDate |
2016-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201600490-A |
| titleOfInvention |
Plasma resistant component |
| abstract |
Provided is a plasma resistant member comprising: a substrate; a cerium oxide polycrystal comprising a surface formed on the surface of the substrate by an aerosol deposition method, and a layered structure having a plasma resistance, constituting the layered structure The cerium oxide polycrystal has a crystal structure in which a cubic crystal and a monoclinic crystal are mixed, and a ratio of monoclinic crystal to cubic crystal in the cerium oxide polycrystal constituting the layered structure is 0% or more and 60% or less, and the layer is formed. The crystallite size of the cerium oxide polycrystal of the structure is 8 nm or more and 50 nm or less. [representative map] |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I643978-B |
| priorityDate |
2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |