Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f1c856e5c7da6cb1e1c917320a6fe34 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-1134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-32105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05567 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13184 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-1147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05571 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05558 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13124 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76883 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13155 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-07811 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49811 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76841 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-10 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 |
filingDate |
2013-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eae60f5415acc922c5cc17607cf7d7c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18a7e0a627c04b3fcfca1540f4ef33e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_548a5844287561f8ebe2b83105cc0ab4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_adaa07532c4de5db78c4617930dd6835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31526436d242bddd6d2e8d03ccf9b7a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5087822fa36e0602f57cc0c4e0d5a92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff2c5222fcb0ceba2d4a143c76dea703 |
publicationDate |
2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201546984-A |
titleOfInvention |
Straight-through twinning and intermediate structure with reduced stress |
abstract |
A component can include a substrate and a conductive via extending in an opening in the substrate. The substrate can have first and second opposing surfaces. The opening may extend from the first surface toward the second surface and may have an inner sidewall extending away from the first surface. A dielectric material can be exposed at the inner sidewall. The electrically conductive perforations may define a reduced pressure passage within the opening adjacent the first surface. The reduced pressure passage may have an edge within a first distance from the inner side wall in a direction parallel to the plane of the first surface and within 5 micrometers below the first surface, the first distance being The smaller of 1 micron and the opening is one of the largest widths of one of the planes. The edge may extend along the inner sidewall to span at least five percent of the circumference of the inner sidewall. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I741331-B |
priorityDate |
2012-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |