| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2014-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25ddb2110235926cd7292ef07e48a0c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59a092fcf9fb8c04dcae7dca29d202b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_545438c59a3cf3195269f47c478a2cc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8d1709d5307f1f3bff598de42c5fead
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_061aece2f04bb0860b3a978d2871b6b3 |
| publicationDate |
2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201546577-A |
| titleOfInvention |
Removal of non-oxidizing strong acids from ion-implanted resists |
| abstract |
The present invention develops a method and composition for removing bulk and/or ion implanted resist materials from a microelectronic device. The compositions effectively remove the ion implanted resist material without damaging the germanium or germanium containing material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I803551-B |
| priorityDate |
2013-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |