| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G63-6886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G63-6856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D181-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-688 |
| filingDate |
2014-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0666762a4e064aeb8f5dd1b8869f7622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_177d98018893f6055bad7c344e1c7556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc6a19055ab71bfe7066169b927fae8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c2a5389178072713a41951ea90bd492
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cae1ada8c4a1cb995f85e11f867aecb7 |
| publicationDate |
2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201546561-A |
| titleOfInvention |
Underlayer film forming composition containing a copolymer having a triazine ring and a sulfur atom in a main chain |
| abstract |
An object of the present invention is to provide a novel resist underlayer film forming composition.nThe solution of the present invention is a resist underlayer film forming composition comprising a copolymer having a structural unit represented by the following formula (1) and a structural unit represented by the following formula (2), a crosslinkable compound, and a cross-linking compound. Contact catalyst and solvent.n□n(wherein A represents a divalent organic group containing a triazine ring; X1 represents a -S- group or an -O- group; and Q represents a linear, branched chain or a chain of 1 to 15 carbon atoms orna cyclic hydrocarbon group which may have at least one sulfur atom or oxygen atom in the main chain, or at least one hydroxyl group as a substituent; n represents 0 or 1; and R1 and R2 each independently represent a carbon number of 1 a alkyl group or a single bond of ~3; Z represents a divalent group having at least one sulfur atom or an oxygen atom; and when X1 represents an -O- group, Z represents a divalent group having at least one sulfur atom. ) |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I707885-B |
| priorityDate |
2013-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |