| abstract |
The present invention relates to a novel absorbent antireflective coating composition comprising a novel repeating unit comprising at least one repeating unit (A) of formula (1) and at least one repeating unit (B) having formula (2) And at least one crosslinkable polymer having the repeating unit (C) of formula (3)n□ wherein D is a direct valence bond or a C(R1)(R2) methylene moiety, wherein R1 and R2 are independently H, C1-C8 alkyl, C3-C24 cycloalkyl or C6-C24 aryl; Ari, Arii, Ariii and Ariv are independently a pendant phenyl and an extended naphthyl moiety, R3 and R4 are independently hydrogen or a C1-C8 alkyl group; and R5 and R6 are independently hydrogen or a C1-C8 alkyl group; and a solvent. The invention also relates to a method of forming an image using the novel antireflective coating composition. |