Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_781c429e4e20536916ff74dcbe1b5417 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G3-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B13-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B9-23 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G3-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25B9-23 |
filingDate |
2015-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d7a4208822824bfd4bef74e0240e986 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1aad98f3ce31bcee5f357a004d4afa27 |
publicationDate |
2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201545990-A |
titleOfInvention |
Copper chloride, CVD raw material, copper wiring film, and copper chloride manufacturing method |
abstract |
The present invention provides a method for producing copper chloride, a CVD raw material, a copper wiring film, and copper chloride which can provide a high-purity organometallic complex having less impurities.nThe present invention is a copper chloride having a purity of 6 N or more and an Ag content of 0.5 wtppm or less. |
priorityDate |
2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |