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filingDate 2015-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201545274-A
titleOfInvention Interconnect assembly with through-hole perforation and stress relief features
abstract A semiconductor device according to some embodiments includes a substrate structure and a conductive interconnect extending through at least a portion of the substrate structure. The conductive interconnects can include stress relief features that are always through the via and accommodate thermal expansion and/or thermal shrinkage of the material to manage internal stresses in the semiconductor device. A method of fabricating the semiconductor device in accordance with some embodiments includes removing material of the conductive interconnect to form a stress relief gap.
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