| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4cb06e675625e0edfcd3f050257d45f4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10N2040-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-112 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00968
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10M109-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00984
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D1-00 |
| filingDate |
2014-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da42f05ab236d5655084d3802170b65b |
| publicationDate |
2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201544617-A |
| titleOfInvention |
Method of forming an anti-adhesive coating and its anti-adhesion coating |
| abstract |
A method of forming an anti-adhesion coating on the surface of a semiconductor component is proposed. Prior to deposition of the anti-stick coating, an atomic layer deposition procedure is used to activate the surface to achieve an anti-adhesion coating with strong chemical bonding to the surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108369297-A |
| priorityDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |