| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D179-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-1071 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate |
2015-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb11f715486e0223d04629e0443f4967
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0de5878b749b37433c92f86eb07118b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7ae0b645a5b9582dd9487953ac7403b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de18c97b114b1d78198934f0aeb582e4 |
| publicationDate |
2015-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201544534-A |
| titleOfInvention |
Method for improving chemical resistance of polymer film, film forming method for polymer film, film forming device, and method for producing electronic product |
| abstract |
An object of the present invention is to provide a method for improving chemical resistance of a polymer film which is improved in chemical resistance of a polymer film formed on a surface of a target object and treated with a drug, and an object of the present invention. When the object to be processed is not removed from the processing chamber of the film forming apparatus that has formed the film, the film forming process of the film is continued, and the film is improved in the processing chamber. Pharmaceutical treatment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110459486-A |
| priorityDate |
2014-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |