http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201543166-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2011-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f1bc73deb335da3a254262ee1090eb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f2053be723a5329e3d7a9c3d3aa07f4 |
| publicationDate | 2015-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201543166-A |
| titleOfInvention | Negative photoresist composition, method of manufacturing the relief pattern using the negative photoresist composition, and electronic component |
| abstract | The present invention provides a negative-type photoresist composition having a high sensitivity and a high resolution in pattern formation by irradiation with an electron beam or EUV, and a pattern of low-line edge roughness can be obtained, and the photoresist composition is used. A method of manufacturing a relief pattern and an electronic component.nThe negative resist composition of the present invention contains a phenolic compound (A) having two or more phenolic hydroxyl groups in one molecule and having 1 in the ortho position of the phenolic hydroxyl group in one molecule. One or more substituents selected from the group consisting of a hydroxymethyl group and an alkoxymethyl group have a molecular weight of 400 to 2,500, and the phenolic compound (A) is in the negative resist composition. The content in all the solid portions is 70% by weight or more. |
| priorityDate | 2010-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 305.