http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201541771-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae7b57cb427de2c773818e7bd86e92be |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-026 |
| filingDate | 2015-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e05b98f74fd6217e1bdb251049f25b23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8718aef7de70ea1696408119a274f66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f6b1f35e68e3f06a2bc54a9045da73a |
| publicationDate | 2015-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201541771-A |
| titleOfInvention | Laser processing apparatus and method |
| abstract | The present invention relates to a laser processing apparatus and a laser processing apparatus, the laser processing apparatus comprising: a laser unit configured to generate a laser beam and separate the laser beam; a scanner unit equipped with an adjusted laser beam a plurality of scanners of propagation direction and configured to provide a propagation path of the laser beam; a directing unit disposed between the laser unit and the scanner unit and configured to selectively separate the separated laser beam Leading to a scanner; an illumination unit configured to illuminate a laser beam passing through the scanner unit on the substrate; and a camera unit configured to photograph the substrate, thereby monitoring the substrate and selectively using the laser beam wavelength. |
| priorityDate | 2014-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447604988 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57350325 |
Total number of triples: 16.