http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201537611-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fbdc51c2665335e616caf341cdaa3d28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2014-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_621f562fc2955562d62280516be9bc41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24a119cf283416d719e9a3c8784c4778 |
| publicationDate | 2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201537611-A |
| titleOfInvention | Plasma processing chamber and method for manufacturing the same |
| abstract | A plasma processing chamber and a method for manufacturing the same, wherein the plasma processing chamber includes a cavity, and a base is disposed under the cavity for carrying a substrate, and a reaction gas is above the cavity Entering the chamber and exciting into a plasma under the action of radio frequency energy to process the substrate on the substrate, wherein the manufacturing method comprises the steps of: providing a substrate and cooling on the substrate a liquid passage; the first insulating layer is adhered to the substrate by hot pressing, wherein a heating device is disposed in the first insulating layer; and a corrosion-resistant coating is formed on the periphery of the substrate by thermal spraying. The invention can effectively prevent arc pollution and metal pollution, and does not cause melting of the material layer due to different pressure and temperature during the manufacturing process. |
| priorityDate | 2014-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.