http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201536852-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2015-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8480941479d47c204fa40dcbe910dc5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f8e6cce869d00b71c3f5f764380c51a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bda610e3d51ab514daf7538f668089e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b40ada315d0789564192dceb9481ef6d |
| publicationDate | 2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201536852-A |
| titleOfInvention | Pattern forming composition and pattern forming method |
| abstract | An object of the present invention is to provide a pattern forming composition which can maintain a phase separation time and a coating property while forming a sufficiently fine pattern on the one hand.nThe present invention provides a pattern forming composition comprising a block copolymer and a solvent pattern forming composition, wherein the block copolymer has a first repeating unit of a germanium-containing atom. a block and a second block formed of a second repeating unit containing no germanium atoms, and can be self-organized to form a phase-separated structure, and the first repeating unit contains two or more germanium atoms and is composed of The sum of the atomic weights of atoms is 700 or less. The above second block is preferably a polystyrene block formed of unsubstituted or substituted styrene units or a poly(meth) acrylate block formed of (meth) acrylate units. |
| priorityDate | 2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 259.