http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201536116-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2014-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cabeb31fe8433fda9e8b884c3a66a94a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_603e5f061a3c31257fcfc70e37ed41d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d72a67099ac366f346c6c867d5f3982c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8b6f82e1298e776bdf7084216e82c38 |
| publicationDate | 2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201536116-A |
| titleOfInvention | Fault detection based on RF impedance model |
| abstract | Explain the method of classifying events. The method includes taking a model of one or more parts of the plasma system. The method further includes receiving data related to the supply of RF power that is supplied to the plasma chamber. The RF power is supplied using a configuration that includes one or more states. The method includes using the data to generate model data at the output of the model. The method includes verifying the model data. The step of testing includes one or more variables that characterize the effectiveness of the plasma processing of the plasma system. The method includes identifying a potential fault for the one or more variables. The method further includes determining that the potential fault has occurred for a predetermined period of time, such that the potential fault is identified as an event. The method includes classifying the event. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734206-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10559453-B2 |
| priorityDate | 2013-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.