| abstract |
The present invention is directed to a novel composition comprising a metal component selected from the group consisting of at least one polyoxometallate, at least one heteropolyoxometallate, and mixtures thereof; and at least one organic component. The invention also relates to methods of making nanorod arrays and nanorod materials and films. The present invention is also directed to novel compositions for forming metal oxide-rich films, and to methods of filling vias or trenches, backfilling vias or trenches, and underlying layers. These materials are widely used in many industrial manufacturing applications, including semiconductor devices, photovoltaic devices, and energy storage industries. |