http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201532742-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d78fe473c8a29219129bbc8bb50f6a59 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-12 |
filingDate | 2014-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8388a486be8252e31329411ec02c6ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9c8844600199370b37b2cfc4c33f26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5547428331814a30da3aaf86bff478e |
publicationDate | 2015-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201532742-A |
titleOfInvention | Dressing device for ramming foaming polyurethane pad |
abstract | The present invention is a dressing device for pressing and slidingly contacting diamond abrasive grains to a foamed polyurethane pad for grinding to trim a foamed polyurethane pad for polishing, the dressing device being characterized in that the diamond abrasive particles are supported on the pedestal The diamond abrasive particles supported by the pedestal have a plurality of particle size numbers, and the diamond abrasive grains of the plurality of particle size numbers are made of high-grain number diamond abrasive grains with a particle size number above #170 and below #140. The low-grain number of diamond abrasive grains are formed, and are supported on the pedestal in such a manner that the height positions of the plurality of fine-grained diamond abrasive grains in contact with the foamed polyurethane pad are in the same plane. Thereby, a dressing device is provided which can sufficiently roughen the surface by one trimming without clogging the foaming holes of the foamed polyurethane pad, and can shorten the dressing time and can set a longer dressing interval. , and can suppress the decrease in productivity. |
priorityDate | 2013-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 199.