http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201532178-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2015-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_479f76c346538fe9eb8fb6a65ab3b18f |
| publicationDate | 2015-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201532178-A |
| titleOfInvention | Substrate processing apparatus and substrate processing method |
| abstract | In the substrate processing apparatus of the present invention, the upper nozzle (181) for discharging the processing liquid toward the substrate is provided. The upper nozzle is connected to the pure water supply unit (184) by a pure water introduction line (72), a connection portion (71), and a treatment liquid common line (74) belonging to a pure water supply line, and the supply line is set to be pure. The pure water of the water valve is introduced into the valve (722). The chemical liquid introduction line (73) connects the chemical liquid introduction position (713) between the upper nozzle and the pure water valve in the supply line and the chemical supply unit (183). The liquid chemical recovery position (715) between the chemical liquid introduction position in the supply line and the pure water valve is connected to one end of the chemical liquid recovery line (75). The chemical solution recovery unit (82) having the ejector (822) provided in the chemical recovery line is disposed between the upper nozzle and the liquid recovery position after the discharge of the chemical liquid from the upper nozzle is completed. The liquid is recovered. Thereby, the chemical solution can be efficiently recovered and reused. |
| priorityDate | 2014-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.